Mercury xenon lamps from the LTI family of specialty discharge light sources lead the way in providing high radiant power in the UV range for high-speed microlithography production environments, as required for the fabrication of printed circuit boards and integrated circuit applications. The lamps are filled with mercury and a rare noble gas; this results in extremely high spectral output energy in the ultraviolet region, which is vital to the photolithography exposure process.

LTI’s mercury xenon lamps are specifically designed for DC operation, bringing longer life, enhanced stability, and instant ignition to any application.

The following information is intended to be a practical guide to give a basic overview of mercury xenon lamps, from design to operating parameters to lamp behavior to care & handling. Common problems are discussed and solutions offered. With an understanding of this information, users will gain optimum performance from their mercury xenon lamps.
Click here to download the entire LTI Mercury Xenon Lamp Technical Information Guide in PDF format. Downloading may take several minutes. This file requires Adobe Acrobat for viewing, which may be downloaded free of charge at www.adobe.com
HGXE LAMP DESIGN

Bulb

Electrodes

Seal

Base

Ignition wire

Filling

PHOTOMETRIC CHARACTERISTICS

Spectrum & color properties

Distribution of luminous intensity

OPERATING EQUIPMENT

Lamp housings

OPERATING PARAMETERS

Burning position

Cooling

Current range

Operating cycle

ELECTRICAL CHARACTERISTICS

Steady state operation

Lamp starting

SAFETY & HANDLING

Warning

Pressure

Brilliance

UV radiation

Ozone

Mechanical installation

Electrical connection

Cleaning lamps

Transportation

TROUBLESHOOTING

Lack of ignition

Melted cathode tip

Dark bulb

Deformed cathode tip

Low light output

BEHAVIOR & PERFORMANCE

Lamp life

Blackening

Arc instability

Ozone generation

Uniformity & focusing